Micromachined interdigital filter on silicon
نویسندگان
چکیده
منابع مشابه
Micromachined 60 GHz Air-filled Interdigital Bandpass Filter
A 4-pole interdigital filter has been demonstrated at 60 GHz with a bandwidth of 10 %, it is made using micromachining and a multi-layer bonding. The filter is an airfilled three-dimensional structure. It is formed of five layers which are bonded together. Each layer is micromachined SU-8 based, 200-μm thick, and finished with 1.5 μm gold coating. The resonators are thick stripline-like and enc...
متن کاملMicromachined Silicon Deformable Mirror
A new silicon deformable minor design is presented which provides high reflectivity, an optical quality continuous surface, and high intensity handling capability. Its features make it useful for a wide range of devices including telescopes, lasers, and photolithographic systems. The mirror architecture is similar to commercial electrostrictive deformable mirrors. A focus corrector built using ...
متن کاملMicromachined analyzers on a silicon chip.
For an example of a silicon-based micromachined analyzer, we describe a combined PO2, PCO2, and pH sensor designed for extracorporeal blood gas monitoring. The clinically well-accepted amperometric (PO2) and potentiometric (PCO2, pH) sensing principles are used, realized in a planar and miniaturized form on a single silicon chip (6 x 22 mm). The transducer part of the chip is fabricated by stan...
متن کاملMicromachined Platforms on Silicon for Micro-sofc
This communication reports on the design, fabrication and testing of special high temperature Si/SiN based micro-hotplates as micromachined platforms for micro-SOFCs. Different designs and materials have been evaluated to realise micro-heating platforms compatible with spray pyrolysed anode, cathode and electrolytes materials. The potential of these micromachined platforms for further integrati...
متن کاملSilicon micromachined ultrasonic immersion transducers
Broadband transmission of ultrasound in water using capacitive, micromachined transducers is reported. Transmission experiments using the same pair of devices at 4, 6, and 8 MHz with a signal-to-noise ratio greater than 48 dB are presented. Transmission is observed from 1 to 20 MHz. Better receiving electronics are necessary to demonstrate operation beyond this range. Furthermore, the same pair...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Microwave and Optical Technology Letters
سال: 2006
ISSN: 0895-2477,1098-2760
DOI: 10.1002/mop.21810